JPS6367248U - - Google Patents
Info
- Publication number
- JPS6367248U JPS6367248U JP15418386U JP15418386U JPS6367248U JP S6367248 U JPS6367248 U JP S6367248U JP 15418386 U JP15418386 U JP 15418386U JP 15418386 U JP15418386 U JP 15418386U JP S6367248 U JPS6367248 U JP S6367248U
- Authority
- JP
- Japan
- Prior art keywords
- sheet
- suction section
- suction
- rollers
- movable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 1
Landscapes
- Die Bonding (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15418386U JPS6367248U (en]) | 1986-10-07 | 1986-10-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15418386U JPS6367248U (en]) | 1986-10-07 | 1986-10-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6367248U true JPS6367248U (en]) | 1988-05-06 |
Family
ID=31073747
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15418386U Pending JPS6367248U (en]) | 1986-10-07 | 1986-10-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6367248U (en]) |
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1986
- 1986-10-07 JP JP15418386U patent/JPS6367248U/ja active Pending